Journals similar to Optical Microlithography XVIII
20 similar journals ranked by semantic similarity (SPECTER2 embeddings)
| # | Journal | Publisher | Field | Similarity | JLCS | OA | APC |
|---|---|---|---|---|---|---|---|
| 1 | Journal of Micro/Nanopatterning Materials and Metrology | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 99.1% | 55 | No | - |
| 2 | Journal of Micro/Nanolithography MEMS and MOEMS | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 99.0% | 75 | No | - |
| 3 | Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV | - | Electrical and Electronic Engineering | 98.3% | 15 | No | - |
| 4 | Journal of Microelectronic Manufacturing | Journal of Microelectronic Manufacturing | Electrical and Electronic Engineering | 98.1% | 80 | Yes (diamond) | Free |
| 5 | Advanced Optical Technologies | De Gruyter | Biomedical Engineering | 97.9% | 100 | Yes (diamond) | 1950 CHF |
| 6 | Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | American Vacuum Society | Electrical and Electronic Engineering | 97.8% | 55 | No | - |
| 7 | Journal of Optical Microsystems | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 97.7% | 75 | No | - |
| 8 | ASMC Proceedings | Institute of Electrical and Electronics Engineers | Electrical and Electronic Engineering | 97.5% | 35 | No | - |
| 9 | SPIE Exhibition Product Demonstrations | - | Electrical and Electronic Engineering | 97.5% | 15 | No | - |
| 10 | Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena | American Vacuum Society | Electrical and Electronic Engineering | 97.4% | 75 | No | - |
| 11 | Microelectronic Engineering | Elsevier | Electrical and Electronic Engineering | 97.4% | 75 | No | 2750 USD |
| 12 | Optical Interference Coatings | - | Electrical and Electronic Engineering | 97.3% | 15 | No | - |
| 13 | Light Advanced Manufacturing | Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences | Biomedical Engineering | 97.3% | 80 | Yes (diamond) | Free |
| 14 | Optical Data Storage | - | Electrical and Electronic Engineering | 97.2% | 15 | No | - |
| 15 | Micro and Nano Engineering | Elsevier | Biomedical Engineering | 97.2% | 80 | Yes (gold) | 1380 USD |
| 16 | Journal of the European Optical Society Rapid Publications | Springer Nature | Atomic and Molecular Physics, and Optics | 97.2% | 80 | Yes (gold) | 1962 USD |
| 17 | Optics & Laser Technology | Elsevier | Electrical and Electronic Engineering | 97.1% | 75 | No | 2970 USD |
| 18 | PhotonicsViews | Wiley | Electrical and Electronic Engineering | 97.1% | 55 | No | - |
| 19 | IEEE Transactions on Semiconductor Manufacturing | Institute of Electrical and Electronics Engineers | Electrical and Electronic Engineering | 97.1% | 75 | No | - |
| 20 | Microfabrication Technology | - | Electrical and Electronic Engineering | 97.1% | 15 | No | - |
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