Journals similar to Journal of Micro/Nanolithography MEMS and MOEMS
20 similar journals ranked by semantic similarity (SPECTER2 embeddings)
| # | Journal | Publisher | Field | Similarity | JLCS | OA | APC |
|---|---|---|---|---|---|---|---|
| 1 | Journal of Micro/Nanopatterning Materials and Metrology | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 99.5% | 55 | No | - |
| 2 | Micro and Nano Engineering | Elsevier | Biomedical Engineering | 99.2% | 80 | Yes (gold) | 1380 USD |
| 3 | Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | American Vacuum Society | Electrical and Electronic Engineering | 99.2% | 55 | No | - |
| 4 | Optical Microlithography XVIII | - | Electrical and Electronic Engineering | 99.0% | 15 | No | - |
| 5 | Microelectronic Engineering | Elsevier | Electrical and Electronic Engineering | 99.0% | 75 | No | 2750 USD |
| 6 | Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena | American Vacuum Society | Electrical and Electronic Engineering | 99.0% | 75 | No | - |
| 7 | Journal of Optical Microsystems | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 98.9% | 75 | No | - |
| 8 | Journal of Micromechanics and Microengineering | IOP Publishing | Biomedical Engineering | 98.8% | 75 | No | - |
| 9 | Nanomanufacturing and Metrology | Springer Nature | Biomedical Engineering | 98.8% | 75 | No | 2090 USD |
| 10 | Journal of Microelectronic Manufacturing | Journal of Microelectronic Manufacturing | Electrical and Electronic Engineering | 98.7% | 80 | Yes (diamond) | Free |
| 11 | Advanced Optical Technologies | De Gruyter | Biomedical Engineering | 98.7% | 100 | Yes (diamond) | 1950 CHF |
| 12 | Light Advanced Manufacturing | Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences | Biomedical Engineering | 98.6% | 80 | Yes (diamond) | Free |
| 13 | Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV | - | Electrical and Electronic Engineering | 98.6% | 15 | No | - |
| 14 | Micromachines | MDPI AG | Biomedical Engineering | 98.4% | 100 | Yes (gold) | 2165 USD |
| 15 | Proceedings, IEEE Micro Electro Mechanical Systems | Institute of Electrical and Electronics Engineers | Biomedical Engineering | 98.4% | 35 | No | - |
| 16 | Japanese Journal of Applied Physics | Japan Society of Applied Physics | Electrical and Electronic Engineering | 98.4% | 55 | No | - |
| 17 | Microfabrication Technology | - | Electrical and Electronic Engineering | 98.4% | 15 | No | - |
| 18 | Journal of Microelectromechanical Systems | Institute of Electrical and Electronics Engineers | Biomedical Engineering | 98.4% | 75 | No | - |
| 19 | Journal of Micro and Nano-Manufacturing | ASME International | Biomedical Engineering | 98.4% | 75 | No | - |
| 20 | 2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest | - | Electrical and Electronic Engineering | 98.4% | 15 | No | - |
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